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SEM, EVO: Zeiss EVO 60

Specifications

SEM, EVO: Zeiss EVO 60

This is a tungsten filament scanning electron microscope with variable pressure mode, enabling imaging of nonconductive samples. Other features of the microscope are:

Specifications

SEM, EVO: Zeiss EVO 60

This is a tungsten filament scanning electron microscope with variable pressure mode, enabling imaging of nonconductive samples. Other features of the microscope are:

  • Water vapor can be introduced in the chamber in variable pressure mode.
  • The microscope can also be used with the Raith Elphy Plus system for electron beam lithography.
  • EDX detector for the element analysis included.