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Precise Coating System: Flextura 200 Polyteknik

Specifications

Precise Coating System: Flextura 200 Polyteknik

This is an automated coating system with two separated e beam evaporate and sputter chambers. The system includes:

Specifications

Precise Coating System: Flextura 200 Polyteknik

This is an automated coating system with two separated e beam evaporate and sputter chambers. The system includes:

  • The sample temperature can be up to 1000°C.
  • Precise dynamic in-situ feedback control by RGA in reactive sputtering.
  • The machine is designed for 100mm samples, any other sample size (less than 100mm) requires an adapter.