Secondary ion mass spectrometry, or SIMS, is one of the most sensitive techniques ever developed for interrogating the uppermost surface layers of a material, from depths of several hundred nanometers (nm) to a single atomic layer. Both dynamic and static SIMS analysis in a single consolidated SIMS instrument is optional. IG20 Gas gun (1-5kev, 0.5uA 100um) and IG5C Caesium gun (1-5kev, 150nA, 80um) are included in the system.

XPS is a surface-sensitive quantitative spectroscopic technique based on photoelectric effect. The elements, their chemical state and overall electronic structure and density of electronic state in material on the surface can be identified. Angular resolution is 0.5°, energy resolution is 5meV and lateral resolution is 100um.  Acceptance Angle: ±15°. Kinetic Energy Range: 0 - 3500 eV 

Pass Energies: 0 - 550 eV continuously adjustable. The best performing detection system (1D-DLD) is available. The XR 50 with a high intensity twin anode X-ray source optimized for XPS experiments is included. The anode is made of silver to avoid any CuLα breakthrough.